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Please be aware that this old REACH registration data factsheet is no longer maintained; it remains frozen as of 19th May 2023.

The new ECHA CHEM database has been released by ECHA, and it now contains all REACH registration data. There are more details on the transition of ECHA's published data to ECHA CHEM here.

Diss Factsheets

Identification

Chemical structure
Display Name:
1,1,1,3,3,3-hexamethyldisilazane
EC Number:
213-668-5
EC Name:
1,1,1,3,3,3-hexamethyldisilazane
CAS Number:
999-97-3
Molecular formula:
C6H19NSi2
IUPAC Name:
bis(trimethylsilyl)amine

Type of Substance

Composition:
mono-constituent substance
Origin:
organic

Substance Identifiers open all close all

  • 1,1,1,3,3,3-Hexamethyldisilazan
  • A-166
  • Dow Corning(R) 4-2839 INT (PL fluid)
  • Dow Corning(R) Z-6079 silazane
  • Dynasylan(R) HMDS
  • Hexamethyldisilazane
  • SC3100Z
  • SH4002ZNC911
  • SH8270U
  • SH9151U
  • SH9161U
  • SL2501A
  • SL3358A
  • SL3358B
  • SL7230A
  • SL7230B
  • SL7240A
  • SL7240B
  • SL7250ATT903
  • SL7250ATT905
  • SL7250BTT903
  • SL7250BTT905
  • SL7260A
  • SL7260ATT903
  • SL7260ATT907
  • SL7260B
  • SL7260BTT903
  • SL7260BTT907
  • SL7270A
  • SL7270ATT903
  • SL7270B
  • SL7270BTT903
  • SL8601ACG791
  • SL8601ACG792
  • SL8601BCG791
  • SL8601BCG792
  • SL8609A
  • SL8609ACG792
  • SL8609B
  • SL8609BCG792
  • SL8640A
  • SL8640B
  • SL9051A
  • SL9051B
  • SL9055A
  • SL9055B
  • SL9340A
  • SL9340B
  • SL9805ARM102
  • SM8110Z
  • SM8120Z
  • Compositions

    Boundary Composition(s) open all close all

    State Form:
    liquid
    Degree of purity:
    > 97 - <= 100 % (w/w)


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    Impurity 1
    Chemical structure
    Reference substance name:
    [amino(dimethyl)silyl]methane
    CAS Number:
    7379-79-5
    Molecular formula:
    C3H11NSi
    IUPAC Name:
    [amino(dimethyl)silyl]methane
    State Form:
    liquid


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine

    Legal Entity Composition(s) open all close all

    State Form:
    liquid


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    State Form:
    liquid


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    State Form:
    liquid


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    State Form:
    liquid
    Degree of purity:
    >= 94 - <= 100 % (w/w)


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    Impurity 1
    Chemical structure
    Reference substance name:
    [amino(dimethyl)silyl]methane
    CAS Number:
    7379-79-5
    Molecular formula:
    C3H11NSi
    IUPAC Name:
    [amino(dimethyl)silyl]methane
    State Form:
    liquid
    Degree of purity:
    >= 98 - < 100 % (w/w)


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    Impurity 1
    Chemical structure
    Reference substance name:
    [amino(dimethyl)silyl]methane
    CAS Number:
    7379-79-5
    Molecular formula:
    C3H11NSi
    IUPAC Name:
    [amino(dimethyl)silyl]methane
    State Form:
    other: Imported as a mixture of no-metal treated surfaces.


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    State Form:
    other: Imported as a mixture of no-metal treated surfaces.


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    State Form:
    liquid


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine
    State Form:
    liquid


    Constituent 1
    Chemical structure
    Reference substance name:
    1,1,1,3,3,3-hexamethyldisilazane
    EC Number:
    213-668-5
    EC Name:
    1,1,1,3,3,3-hexamethyldisilazane
    CAS Number:
    999-97-3
    Molecular formula:
    C6H19NSi2
    IUPAC Name:
    bis(trimethylsilyl)amine