Registration Dossier

Data platform availability banner - registered substances factsheets

Please be aware that this old REACH registration data factsheet is no longer maintained; it remains frozen as of 19th May 2023.

The new ECHA CHEM database has been released by ECHA, and it now contains all REACH registration data. There are more details on the transition of ECHA's published data to ECHA CHEM here.

Diss Factsheets

Manufacture, use & exposure

Uses at industrial sites

Uses at industrial sites

Registration/ Notification status for the use:
use registered according to REACH Article 10; total tonnage manufactured/imported <10tonnes/year per registrant
Use name:
Industrial use of the substance as antireflective coating of semiconductors
Contributing activity / technique for the environment
Name of activity / technique:
Industrial use of the substance as antireflective coating of semiconductors
Environmental release category (ERC):
ERC5: Use at industrial site leading to inclusion into/onto article
Contributing activity / technique for workersopen allclose all
Name of activity / technique:
Handling and transfer of the substance in liquid from
Process category (PROC):
PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
PROC 9: Transfer of substance or mixture into small containers (dedicated filling line, including weighing)
Name of activity / technique:
Handling and transfer of the solid substance
Process category (PROC):
PROC 26: Handling of solid inorganic substances at ambient temperature
Name of activity / technique:
Closed process
Process category (PROC):
PROC 2: Chemical production or refinery in closed continuous process with occasional controlled exposure or processes with equivalent containment conditions
Name of activity / technique:
Semi-closed process
Process category (PROC):
PROC 4: Chemical production where opportunity for exposure arises
Name of activity / technique:
Mixing or blending
Process category (PROC):
PROC 5: Mixing or blending in batch processes
Name of activity / technique:
Sampling and quality control
Process category (PROC):
PROC 15: Use as laboratory reagent
Name of activity / technique:
Industrial spraying
Process category (PROC):
PROC 7: Industrial spraying
Name of activity / technique:
Cleaning and maintenance
Process category (PROC):
PROC28: Manual maintenance (cleaning and repair) of machinery
Product category used:
PC 9a: Coatings and paints, thinners, paint removes
Sector of end use:
SU 16: Manufacture of computer, electronic and optical products, electrical equipment
Substance supplied to that use in form of:
as such
in a mixture
Subsequent service life relevant for this use:
yes