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EC number: 231-130-8
CAS number: 7440-21-3
Surface composition analysis of silicon was performed by using x‐ray
photoelectron spectroscopy (XPS). Oxidized silicon, both silicon dioxide
and silicon sub-oxides, was found to be the main component on the
surface. The signal of non-oxidized silicon detected in the analysis of
silicon surface was associated with the silicon core right below the
very thin (few nanometer thick) oxidized surface layer.
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