Registration Dossier

Manufacture, use & exposure

Uses at industrial sites

Uses at industrial sites

Registration/ Notification status for the use:
use registered according to REACH Article 10; total tonnage manufactured/imported <10tonnes/year per registrant
Use name:
Manufacture of semiconductor materials
Contributing activity / technique for the environment
Name of activity / technique:
C4F6 is used for the etching of semiconductor material or the cleaning of chemicals vapour deposition chambers within semiconductor sector.
Environmental release category (ERC):
ERC5: Use at industrial site leading to inclusion into/onto article
Contributing activity / technique for workers
Name of activity / technique:
C4F6 is used for the etching of semiconductor material or the cleaning of chemicals vapour deposition chambers within semiconductor sector.
Process category (PROC):
PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
PROC 15: Use as laboratory reagent
Product category used:
PC 21: Laboratory chemicals
PC 33: Semiconductors
Sector of end use:
SU 16: Manufacture of computer, electronic and optical products, electrical equipment
Substance supplied to that use in form of:
as such
Subsequent service life relevant for this use:
no