Registration Dossier
Registration Dossier
Please be aware that this old REACH registration data factsheet is no longer maintained; it remains frozen as of 19th May 2023.
The new ECHA CHEM database has been released by ECHA, and it now contains all REACH registration data. There are more details on the transition of ECHA's published data to ECHA CHEM here.
Use of this information is subject to copyright laws and may require the permission of the owner of the information, as described in the ECHA Legal Notice.
EC number: 200-899-1 | CAS number: 75-76-3
Manufacture, use & exposure
Uses at industrial sites
Documentsopen allclose all
Uses at industrial sites
- Registration/ Notification status for the use:
- use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
- Name:
- Tetramethylsilane
- Type of composition:
- legal entity composition of the substance
- State / form:
- liquid
- Reference substance:
- Tetramethylsilane
- Name of activity / technique:
- Use as chemical intermediate
- Environmental release category (ERC):
- ERC6a: Use of intermediate
- Name of activity / technique:
- Use as chemical intermediate
- Process category (PROC):
- PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
- Name of activity / technique:
- Use as chemical intermediate
- Process category (PROC):
- PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
- Name of activity / technique:
- Use as chemical intermediate
- Process category (PROC):
- PROC 9: Transfer of substance or mixture into small containers (dedicated filling line, including weighing)
- Name of activity / technique:
- Use as a chemical intermediate
- Process category (PROC):
- PROC 8a: Transfer of substance or mixture (charging and discharging) at non-dedicated facilities
- PROC28: Manual maintenance (cleaning and repair) of machinery
- Sector of end use:
- SU 8: Manufacture of bulk, large scale chemicals (including petroleum products)
- SU 9: Manufacture of fine chemicals
- Substance supplied to that use in form of:
- as such
- Subsequent service life relevant for this use:
- no
- Related assessment:
- use assessed in a joint CSR
Reference
Contributing activity / technique for the environment
Contributing activity / technique for workersopen allclose all
Uses at industrial sites
Contributing activity / technique for workers
- Process category (PROC):
- PROC 15: Use as laboratory reagent
- Product category used:
- PC 21: Laboratory chemicals
- Sector of end use:
- SU 24: Scientific research and development
- Substance supplied to that use in form of:
- in a mixture
- Subsequent service life relevant for this use:
- no
Uses at industrial sites
- Registration/ Notification status for the use:
- use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
Contributing activity / technique for the environment
- Name of activity / technique:
- Use as laboratory reagent
- Environmental release category (ERC):
- ERC6b: Use of reactive processing aid at industrial site (no inclusion into or onto article)
Contributing activity / technique for workers
- Name of activity / technique:
- Use as laboratory reagent
- Process category (PROC):
- PROC 15: Use as laboratory reagent
- Product category used:
- PC 21: Laboratory chemicals
- Sector of end use:
- SU 24: Scientific research and development
- Subsequent service life relevant for this use:
- no
- Related assessment:
- use assessed in a joint CSR
Uses at industrial sites
Contributing activity / technique for the environment
- Environmental release category (ERC):
- ERC6b: Use of reactive processing aid at industrial site (no inclusion into or onto article)
Contributing activity / technique for workersopen allclose all
- Process category (PROC):
- PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
- Process category (PROC):
- PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
- Product category used:
- PC 33: Semiconductors
- Sector of end use:
- SU 16: Manufacture of computer, electronic and optical products, electrical equipment
- Substance supplied to that use in form of:
- as such
- Subsequent service life relevant for this use:
- no
- Related assessment:
- use assessed in a joint CSR
Uses at industrial sites
- Registration/ Notification status for the use:
- use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
Contributing activity / technique for the environment
- Name of activity / technique:
- Use as laboratory reagent
- Environmental release category (ERC):
- ERC4: Use of non-reactive processing aid at industrial site (no inclusion into or onto article)
Contributing activity / technique for workers
- Name of activity / technique:
- Use as laboratory reagent
- Process category (PROC):
- PROC 15: Use as laboratory reagent
- Product category used:
- PC 21: Laboratory chemicals
- Sector of end use:
- SU 24: Scientific research and development
- Subsequent service life relevant for this use:
- no
- Related assessment:
- use assessed in a joint CSR
Uses at industrial sites
Contributing activity / technique for the environment
- Environmental release category (ERC):
- ERC6b: Use of reactive processing aid at industrial site (no inclusion into or onto article)
Contributing activity / technique for workersopen allclose all
- Process category (PROC):
- PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
- Process category (PROC):
- PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
- Product category used:
- PC 33: Semiconductors
- Sector of end use:
- SU 16: Manufacture of computer, electronic and optical products, electrical equipment
- Substance supplied to that use in form of:
- in a mixture
- Subsequent service life relevant for this use:
- no
Uses at industrial sites
- Registration/ Notification status for the use:
- use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
Contributing activity / technique for the environment
- Name of activity / technique:
- Manufacture; Semiconductors
- Environmental release category (ERC):
- ERC6b: Use of reactive processing aid at industrial site (no inclusion into or onto article)
Contributing activity / technique for workersopen allclose all
- Name of activity / technique:
- General exposures; Closed systems
- Process category (PROC):
- PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
- Name of activity / technique:
- Loading and unloading; Dedicated facility
- Process category (PROC):
- PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
- Name of activity / technique:
- Equipment cleaning and maintenance
- Process category (PROC):
- PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
- PROC28: Manual maintenance (cleaning and repair) of machinery
- Product category used:
- PC 33: Semiconductors
- Sector of end use:
- SU 16: Manufacture of computer, electronic and optical products, electrical equipment
- Subsequent service life relevant for this use:
- no
- Related assessment:
- use assessed in a joint CSR
Uses at industrial sites
- Registration/ Notification status for the use:
- use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
- Name:
- tetramethylsilane
- Type of composition:
- legal entity composition of the substance
- State / form:
- liquid
- Reference substance:
- tetramethylsilane
- Name of activity / technique:
- use as semiconductor
- Environmental release category (ERC):
- ERC6b: Use of reactive processing aid at industrial site (no inclusion into or onto article)
- Name of activity / technique:
- use as semiconductor
- Process category (PROC):
- PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
- PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
- Product category used:
- PC 33: Semiconductors
- Sector of end use:
- SU 16: Manufacture of computer, electronic and optical products, electrical equipment
- Substance supplied to that use in form of:
- as such
- Subsequent service life relevant for this use:
- no
- Related assessment:
- use assessed in a joint CSR
Reference
Contributing activity / technique for the environment
Contributing activity / technique for workers
Uses at industrial sites
Contributing activity / technique for the environment
- Environmental release category (ERC):
- ERC6a: Use of intermediate
Contributing activity / technique for workersopen allclose all
- Process category (PROC):
- PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
- Process category (PROC):
- PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
- Process category (PROC):
- PROC 9: Transfer of substance or mixture into small containers (dedicated filling line, including weighing)
- Product category used:
- PC 19: Intermediate
- Sector of end use:
- SU 8: Manufacture of bulk, large scale chemicals (including petroleum products)
- SU 9: Manufacture of fine chemicals
- Substance supplied to that use in form of:
- in a mixture
- Subsequent service life relevant for this use:
- no
Uses at industrial sites
- Registration/ Notification status for the use:
- use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
Contributing activity / technique for the environment
- Name of activity / technique:
- Use as laboratory reagent
- Environmental release category (ERC):
- ERC4: Use of non-reactive processing aid at industrial site (no inclusion into or onto article)
Contributing activity / technique for workers
- Name of activity / technique:
- Use as laboratory reagent
- Process category (PROC):
- PROC 15: Use as laboratory reagent
- Product category used:
- PC 21: Laboratory chemicals
- Sector of end use:
- SU 24: Scientific research and development
- Substance supplied to that use in form of:
- as such
- Subsequent service life relevant for this use:
- no
- Related assessment:
- use assessed in a joint CSR
Uses at industrial sites
- Registration/ Notification status for the use:
- use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
- Name:
- tetramethylsilane
- Type of composition:
- legal entity composition of the substance
- State / form:
- liquid
- Reference substance:
- tetramethylsilane
- Name of activity / technique:
- use for research and development
- Environmental release category (ERC):
- ERC7: Use of functional fluid at industrial site
- Name of activity / technique:
- use for research and development
- Process category (PROC):
- PROC 15: Use as laboratory reagent
- Product category used:
- PC 21: Laboratory chemicals
- Sector of end use:
- SU 24: Scientific research and development
- Substance supplied to that use in form of:
- as such
- Subsequent service life relevant for this use:
- no
- Related assessment:
- use assessed in a joint CSR
Reference
Contributing activity / technique for the environment
Contributing activity / technique for workers
Uses at industrial sites
- Registration/ Notification status for the use:
- use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
- Name:
- Tetramethylsilane
- Type of composition:
- legal entity composition of the substance
- State / form:
- liquid
- Reference substance:
- Tetramethylsilane
- Name of activity / technique:
- Use in chemical vapour deposition (CVD)
- Environmental release category (ERC):
- ERC6b: Use of reactive processing aid at industrial site (no inclusion into or onto article)
- Name of activity / technique:
- Use in chemical vapour deposition (CVD)
- Process category (PROC):
- PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
- Name of activity / technique:
- Use in chemical vapour deposition (CVD)
- Process category (PROC):
- PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
- Name of activity / technique:
- Use in chemical vapour deposition (CVD)
- Process category (PROC):
- PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
- PROC28: Manual maintenance (cleaning and repair) of machinery
- Product category used:
- PC 33: Semiconductors
- Sector of end use:
- SU 16: Manufacture of computer, electronic and optical products, electrical equipment
- Substance supplied to that use in form of:
- as such
- Subsequent service life relevant for this use:
- no
- Related assessment:
- use assessed in a joint CSR
Reference
Contributing activity / technique for the environment
Contributing activity / technique for workersopen allclose all
Uses at industrial sites
- Registration/ Notification status for the use:
- use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
Contributing activity / technique for the environment
- Name of activity / technique:
- Use as an intermediate
- Environmental release category (ERC):
- ERC6a: Use of intermediate
Contributing activity / technique for workersopen allclose all
- Name of activity / technique:
- Transfer of substance or mixture (charging/discharging) at dedicated facilities
- Process category (PROC):
- PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
- Name of activity / technique:
- Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
- Process category (PROC):
- PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
- Name of activity / technique:
- Transfer of substance or mixture into small containers (dedicated filling line, including weighing)
- Process category (PROC):
- PROC 9: Transfer of substance or mixture into small containers (dedicated filling line, including weighing)
- Name of activity / technique:
- Equipment cleaning and maintenance
- Process category (PROC):
- PROC 8a: Transfer of substance or mixture (charging and discharging) at non-dedicated facilities
- PROC28: Manual maintenance (cleaning and repair) of machinery
- Sector of end use:
- SU 8: Manufacture of bulk, large scale chemicals (including petroleum products)
- SU 9: Manufacture of fine chemicals
- Subsequent service life relevant for this use:
- no
- Related assessment:
- use assessed in a joint CSR
Uses at industrial sites
Contributing activity / technique for workers
- Process category (PROC):
- PROC 15: Use as laboratory reagent
- Product category used:
- PC 21: Laboratory chemicals
- Sector of end use:
- SU 24: Scientific research and development
- Substance supplied to that use in form of:
- as such
- Subsequent service life relevant for this use:
- no
- Related assessment:
- use assessed in a joint CSR
Uses at industrial sites
- Registration/ Notification status for the use:
- use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
- Name:
- Tetramethylsilane
- Type of composition:
- legal entity composition of the substance
- State / form:
- liquid
- Reference substance:
- Tetramethylsilane
- Name of activity / technique:
- Use as laboratory reagent
- Environmental release category (ERC):
- ERC6b: Use of reactive processing aid at industrial site (no inclusion into or onto article)
- Name of activity / technique:
- Use as laboratory reagent
- Process category (PROC):
- PROC 15: Use as laboratory reagent
- Product category used:
- PC 21: Laboratory chemicals
- Sector of end use:
- SU 24: Scientific research and development
- Substance supplied to that use in form of:
- as such
- Subsequent service life relevant for this use:
- no
- Related assessment:
- use assessed in a joint CSR
Reference
Contributing activity / technique for the environment
Contributing activity / technique for workers
Uses at industrial sites
- Registration/ Notification status for the use:
- use registered according to REACH Article 10; total tonnage manufactured/imported >=10tonnes/year per registrant
- Name:
- Tetramethylsilane
- Type of composition:
- legal entity composition of the substance
- State / form:
- liquid
- Reference substance:
- Tetramethylsilane
- Environmental release category (ERC):
- ERC6b: Use of reactive processing aid at industrial site (no inclusion into or onto article)
- Process category (PROC):
- PROC 1: Chemical production or refinery in closed process without likelihood of exposure or processes with equivalent containment conditions
- PROC 8b: Transfer of substance or mixture (charging and discharging) at dedicated facilities
- Product category used:
- PC 33: Semiconductors
- Sector of end use:
- SU 16: Manufacture of computer, electronic and optical products, electrical equipment
- Substance supplied to that use in form of:
- as such
- Subsequent service life relevant for this use:
- no
- Related assessment:
- use assessed in a joint CSR
Reference
Contributing activity / technique for the environment
Contributing activity / technique for workers
Information on Registered Substances comes from registration dossiers which have been assigned a registration number. The assignment of a registration number does however not guarantee that the information in the dossier is correct or that the dossier is compliant with Regulation (EC) No 1907/2006 (the REACH Regulation). This information has not been reviewed or verified by the Agency or any other authority. The content is subject to change without prior notice.
Reproduction or further distribution of this information may be subject to copyright protection. Use of the information without obtaining the permission from the owner(s) of the respective information might violate the rights of the owner.
